1 General Provisions
1.0.1 This code is prepared with a view to make the engineering design, construction and acceptance of chemical supply system, chemical reclaiming system and their supporting facilities of electronic factory, comply with the policy guidelines of national engineering construction, and ensure the safety and reliability, energy conservation, environmental protection, technical advancement, economic applicability of the engineering.
1.0.2 This code is applicable to the design, construction and acceptance of constructed, renovated or extended engineering of chemical supply system and chemical reclaiming system in such production processes of electronic factory as integrated circuit, flat display device and solar panel in electronics industry.
1.0.3 This code is not applicable to the design, construction and acceptance of chemical system engineering of production auxiliary and public facility system such as chemical warehouse, equipment cleaning, wastewater treatment, pure water preparation and waste gas treatment in electronic factory.
1.0.4 The design, construction and acceptance of chemical system engineering of electronic factory shall not only meet the requirements of this code, but also those in the current relevant ones of the nation.
2 Terms and Abbreviation
2.1 Terms
2.1.1 Chemical system
A general term of acid/alkali containing chemical, solvent chemical and grinding fluid chemical systems of electronic factory.
2.1.2 Chemical supply system
A general term of piping and equipment of acid/alkali containing chemical, solvent chemical and grinding fluid chemical supply system of electronic factory.
2.1.3 Chemical reclaiming system
A general term of piping and equipment of acid/alkali containing chemical, solvent chemical and grinding fluid chemical reclaiming system of electronic factory.
2.1.4 Chemical lorry
The specialized vehicle used for transporting large amount of chemicals in electronic factory.
2.1.5 Chemical container
The small volume container used for storing chemicals in electronic factory. It is placed in the chemical unit of chemical storage distribution room.
2.1.6 Chemical storage tank
The large volume container used for storing chemicals in electronic factory. It is fixed in chemical storage distribution room.
2.1.7 Valve manifold box (VMB)
The valve operation box by which chemicals can be supplied to two or more sets of production equipment through supply piping.
2.1.8 Tee box (TB)
The piping distribution box supplying two or more valve manifold boxes in chemical supply system.
2.1.9 Future tee box (FTB)
The valve box set at system terminal and used for system expansion in chemical supply system.
2.1.10 Sampling box (SB)
The valve box used for chemical sampling on chemical piping.
2.1.11 Leakage detector
The equipment used for detecting the chemical leakage of equipment like chemical unit, chemical storage tank and chemical valve manifold box and providing signal.
2.1.12 Chemical monitor system
The remote monitor system for realizing monitor, display, alarm, data collection and the like for chemical supply system and chemical reclaiming system.
2.1.13 Chemical dilution unit
A general term of equipment which dilute high concentration chemicals with pure water in the chemical system of electronic factory.
2.1.14 Chemical mixing unit
A general term of equipment which mix two or more types of chemicals in the chemical system of electronic factory.
2.1.15 Chemical charge unit
The standby supply equipment of the chemical system of lorry.
2.1.16 Chemical supply unit
The equipment supplying chemicals for the process system of electronic factory.
2.1.17 Chemical unit
A general term of such cabinets as chemical charge unit, chemical dilution unit, chemical mixing unit and chemical supply unit in chemical supply system.
2.1.18 Chemical storage and distribution rooms
A general term of rooms used for arranging chemical storage and distribution equipment & systems in electronic industry production building or individual building (structure).
2.1.19 Liquid level detector
The measuring element used for detecting the liquid level of container in chemical storage tank and chemical unit.
2.1.20 Flame detector
The induction device used for detecting the generated infrared rays or ultraviolet rays radiant heat when fire breaks out due to the leakage of combustible chemical.
1 General Provisions
2 Terms and Abbreviation
2.1 Terms
2.2 Abbreviation
3 Chemical Supply System
3.1 General Requirements
3.2 Supply Equipment
3.3 Supply Piping System
3.4 Equipment and Piping Materials
3.5 Piping Identification
4 Chemical Reclaiming System
4.1 General Requirements
4.2 Reclaiming Equipment
4.3 Reclaiming Piping
5 Chemical Monitor and Safety System
5.1 General Requirements
5.2 Equipment Requirement
5.3 System Requirement
6 Design of Relating Disciplines
6.1 Building Structure
6.2 Electrical and Instrument Control
6.3 Plumbing and Fire Protection
6.4 Ventilation and Air Conditioning
7 Engineering Construction and Acceptance
7.1 General Requirement
7.2 Site Inspection and Acceptance of Equipment and Materials
7.3 Equipment Installation
7.4 Chemical Supply Piping Installation
7.5 Construction and Installation of Double-wall Piping
7.6 Welding Installation of Inner Piping of Acid/alkali Containing Piping
7.7 Installation of Solvent Chemical Piping
7.8 Construction of Waste Liquid Piping
7.9 Piping Equipment Identification
7.10 Pipeline and System Testing
7.11 Construction of Renovation Engineering
7.12 Engineering Acceptance
Explanation of Wording in This Code
List of Quoted Standards
